07/950,088 | 5002:

FILM UNIFORMITY BY SELECTIVE PRESSURE GRADIENT CONTROL

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Application #

07/950,088

Confirmation #

1425

Attorney Docket #

5002

Patent #

5,387,289open_in_new
Download PDFdownload  Textdownload Issued - 02/07/1995

Filing or 371 (c) date

09/22/1992

Status

Patented Case 07/12/1999

Documents & transaction history

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