08/987,076 | HQ9-97-061:

LOW TEMPERATURE DIFFUSION PROCESS FOR DOPANT CONCENTRATION ENHANCEMENT

Public view
Application #

08/987,076

Confirmation #

5803

Attorney Docket #

HQ9-97-061

Patent #

6,057,216open_in_new
Download PDFdownload  Textdownload Issued - 05/02/2000

Filing or 371 (c) date

12/09/1997

Status

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 06/02/2008

Application data

Application type

Utility

Examiner

-

Group art unit

2813

Class/subclass

438/559.000

AIA (first inventor to file)

No

Entity status

Regular Undiscounted

Earliest publication #

-

Earliest publication date

-

Assignee for publication
-
Confirmation #
    5803
Intl. registration # (Hague)

-

Intl. registration publication date

-

Correspondence address
- STEVEN CAPELLA
IBM CORPORATION
1580 ROUTE 52
BUILDING 300-482 DEPARTMENT 18G
HOPEWELL JUNCTIONNY 
UNITED STATES
Inventors
  • LAERTIS ECONOMIKOS
    WAPPINGERS FALLS, NEW YORK (US)
  • CHERUVU S. MURTHY
    HOPEWELL JUNCTION, NEW YORK (US)
  • HUA SHEN
    BEACON, NEW YORK (US)
Applicants