The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.
The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.
Loading...
09/166,392 | TS97-474:
NEW DOUBLE LAYER METHOD FOR FABRICATING A RIM TYPE ATTENUATING PHASE SHIFTING MASK
Public viewApplication #
09/166,392
Confirmation #
9080
Attorney Docket #
TS97-474
Patent #
6,007,324
Download PDF Text Issued - 12/28/1999
Filing or 371 (c) date
10/05/1998
Status
Patented Case 12/17/1999
Application data
Application type
Utility
Examiner
-
Group art unit
1756
Class/subclass
430/005.000
AIA (first inventor to file)
No
Entity status
Regular Undiscounted
Earliest publication #
-
Earliest publication date
-
Assignee for publication
-Confirmation #
9080
Intl. registration # (Hague)
-
Intl. registration publication date
-
Correspondence address
28112 - SAILE ACKERMAN LLC
28 DAVIS AVENUE
POUGHKEEPSIE, NY
UNITED STATES
Inventors
- SAN-DE TZUHSIN-CHU (TW)
- SHI-JAY LINTAIPEI (TW)
- CHING CHIN LINKEELONG (TW)