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10/254,601 | P 271214:
SEMICONDUCTOR MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
Public viewApplication #
10/254,601
Confirmation #
9769
Attorney Docket #
P 271214
Patent #
6,794,204
Issued - 09/21/2004
Filing or 371 (c) date
09/26/2002
Status
Patented Case 09/02/2004
Application data
Application type
Utility
Examiner
MICHELLE MANDALA
Group art unit
2823
Class/subclass
438/014.000
AIA (first inventor to file)
No
Entity status
Regular Undiscounted
Earliest publication #
US 2003-0022469 A1Download PDF Text
Earliest publication date
01/30/2003
Assignee for publication
-Confirmation #
9769
Intl. registration # (Hague)
-
Intl. registration publication date
-
Correspondence address
909 - Pillsbury Winthrop Shaw Pittman, LLP
PO Box 10500
McLean, VA
UNITED STATES
Inventors
- Hiroyuki HasegawaTokyo (JP)
- Tomonori YamaokaTokyo (JP)
- Yoshio IshiharaTokyo (JP)
- Hiroshi MasusakiTokyo (JP)