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12/846,652 | 2857.1030001:

METHODS AND SCATTEROMETERS, LITHOGRAPHIC SYSTEMS, AND LITHOGRAPHIC PROCESSING CELLS

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Application #

12/846,652

Confirmation #

2368

Attorney Docket #

2857.1030001

Patent #

9,081,303open_in_new
Download PDFdownload  Textdownload Issued - 07/14/2015

Filing or 371 (c) date

07/29/2010

Status

Patented Case 06/24/2015

Application data

Application type

Utility

Examiner

GORDON J STOCK JR

Group art unit

2886

Class/subclass

356/399.000

AIA (first inventor to file)

No

Entity status

Regular Undiscounted

Earliest publication #

US 2011-0027704 A1open_in_new Download PDFdownload  Textdownload

Earliest publication date

02/03/2011

Assignee for publication
  • ASML Netherlands B.V.
    Veldhoven (NL)
Confirmation #
    2368
Intl. registration # (Hague)

-

Intl. registration publication date

-

Correspondence address
26111 - STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.
1101 K Street, NW
10th Floor
WASHINGTON, DC 
UNITED STATES
Inventors
  • Hugo Augustinus Joseph Cramer
    Eindhoven (NL)
  • Arie Jeffrey Den Boef
    Waalre (NL)
  • Henricus Johannes Lambertus Megens
    Waalre (NL)
  • Hendrik Jan Hidde Smilde
    Veldhoven (NL)
Applicants