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14/026,753 | 2013-0596/24061.2573:

SYSTEMS AND METHODS FOR SIMILARITY-BASED SEMICONDUCTOR PROCESS CONTROL

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Application #

14/026,753

Confirmation #

4467

Attorney Docket #

2013-0596/24061.2573

Patent #

9,070,622open_in_new
Issued - 06/30/2015

Filing or 371 (c) date

09/13/2013

Status

Patented Case 06/10/2015

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